Document Detail


A simple method for fabricating a Mach-Zehnder type waveguide using sol-gel derived photopatternable hybrid materials for optical biosensors.
MedLine Citation:
PMID:  21780494     Owner:  NLM     Status:  In-Process    
Abstract/OtherAbstract:
In this work, we report on a simple method to fabricate a Mach-Zehnder type waveguide pattern using photopatternable sol-gel organic-inorganic hybrid materials. The refractive indices and propagation losses of the gel films were measured using the prism coupling method. The refractive indices of the resulting films were significantly influenced by the 3-trimethoxysilylpropylmethacrylate (TMSPM) concentration, and the average propagation loss was 0.32-0.52 dB/cm at the wavelength of 632.8 nm. The waveguides were fabricated using spin-coating and a photolithography technique. The Y-branch and straight pattern of the Mach-Zehnder waveguide were well-defined and had high transparency (> 97%) in the visible region. The average thickness of the gel films was 10 microm, and the average width of the Mach-Zehnder pattern was 10 microm. The structural and optical properties of the fabricated patterns were analyzed using scanning electron microscopy (SEM), atomic force microscopy (AFM), near-infrared (IR) spectroscopy, and ultraviolet (UV)-visible spectroscopy.
Authors:
Bich Thi Luong; Jin-Woo Oh; Jongwan Choi; Nakjoong Kim
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Publication Detail:
Type:  Journal Article; Research Support, Non-U.S. Gov't    
Journal Detail:
Title:  Journal of nanoscience and nanotechnology     Volume:  11     ISSN:  1533-4880     ISO Abbreviation:  J Nanosci Nanotechnol     Publication Date:  2011 May 
Date Detail:
Created Date:  2011-07-25     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101088195     Medline TA:  J Nanosci Nanotechnol     Country:  United States    
Other Details:
Languages:  eng     Pagination:  4546-50     Citation Subset:  IM    
Affiliation:
Department of Chemistry and Research Institute for Natural Sciences, Hanyang University, 17 Haengdang-Dong, Seongdong-Gu, Seoul 133-791, Korea.
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