| A practical vacuum sensor based on a ZnO nanowire array. | |
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MedLine Citation:
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PMID: 21030754 Owner: NLM Status: In-Process |
Abstract/OtherAbstract:
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We report a practical vacuum pressure sensor based on a ZnO nanowire array (NWA). An oriented single-crystal ZnO NWA was synthesized by electrodeposition. The device consists of two ITO glass plates coated with a ZnO NWA. Scanning electron microscopy (SEM) and the x-ray diffraction (XRD) pattern show that the as-grown ZnO NWAs are single-crystal and roughly oriented with the ZnO(002) plane parallel to the substrate. Through measuring the pressure dependent resistance of the sensor at different gas species and temperatures, we discovered that the resistance increases monotonically with vacuum pressure. This demonstrates that a practical vacuum sensor could be fabricated since measurements were carried out with a normal multimeter, with no need for the high sensitivity and costly equipment as routinely required in nanotechnology for extremely weak signals. Measurement at elevated temperature (300 °C) showed that the vacuum sensor is much stabler and more sensitive to O(2) pressure. The principle of the device relates to the adsorbed oxygen species on the large surface area of a ZnO NWA to form a resistive depletion layer at the nanowire (NW) surface. |
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Authors:
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Liming Wu; FangFang Song; Xuxiong Fang; Zhi-Xin Guo; S Liang |
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Publication Detail:
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Type: Journal Article; Research Support, Non-U.S. Gov't Date: 2010-10-29 |
Journal Detail:
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Title: Nanotechnology Volume: 21 ISSN: 1361-6528 ISO Abbreviation: Nanotechnology Publication Date: 2010 Nov |
Date Detail:
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Created Date: 2010-10-29 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 101241272 Medline TA: Nanotechnology Country: England |
Other Details:
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Languages: eng Pagination: 475502 Citation Subset: IM |
Affiliation:
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Department of Chemistry, Renmin University of China, Beijing, People's Republic of China. |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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