Document Detail


A measuring interferometer for high accuracy alignment.
MedLine Citation:
PMID:  20068988     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
An interferometer is described that is capable of measuring the deviation of a target device from a plane with an accuracy of 0.1 micro, when the interferometer-target separation is as much as 10 m. This interferometer resembles one described in 1965 by Baldwin and Whitten in that they both use a Kösters prism and a Porro prism. The present use of a laser for the light source yields nonlocalized fringes at the output that are easily monitored by an electronic fringe detector.
Authors:
R O Naess
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  7     ISSN:  0003-6935     ISO Abbreviation:  Appl Opt     Publication Date:  1968 Nov 
Date Detail:
Created Date:  2010-01-13     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  2315-7     Citation Subset:  -    
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