Document Detail


The development and characteristics of a high-speed EELS mapping system for a dedicated STEM.
MedLine Citation:
PMID:  18322296     Owner:  NLM     Status:  MEDLINE    
Abstract/OtherAbstract:
A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV.
Authors:
Shigeto Isakozawa; Kazutoshi Kaji; Konrad Jarausch; Shohei Terada; Norio Baba
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Journal of electron microscopy     Volume:  57     ISSN:  1477-9986     ISO Abbreviation:  J Electron Microsc (Tokyo)     Publication Date:  2008 Apr 
Date Detail:
Created Date:  2008-03-06     Completed Date:  2008-04-11     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  7611157     Medline TA:  J Electron Microsc (Tokyo)     Country:  Japan    
Other Details:
Languages:  eng     Pagination:  41-5     Citation Subset:  IM    
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
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MeSH Terms
Descriptor/Qualifier:
Chromium / chemistry
Microscopy, Electron, Scanning Transmission / instrumentation,  methods*
Silicon Dioxide / chemistry
Spectroscopy, Electron Energy-Loss / instrumentation,  methods*
Titanium / chemistry
Chemical
Reg. No./Substance:
7440-32-6/Titanium; 7440-47-3/Chromium; 7631-86-9/Silicon Dioxide

From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine


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