| The development and characteristics of a high-speed EELS mapping system for a dedicated STEM. | |
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MedLine Citation:
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PMID: 18322296 Owner: NLM Status: MEDLINE |
Abstract/OtherAbstract:
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A new EELS (electron energy loss spectroscopy) real-time elemental mapping system has been developed for a dedicated scanning transmission electron microscope (STEM). The previous two-window-based jump-ratio system has been improved by a three-window-based system. It is shown here that the three-window imaging method has less artificial intensity in elemental maps than the two-window-based method. Using the new three-window system, the dependence of spatial resolution on the energy window width was studied experimentally and also compared with TEM-based EELS. Here it is shown experimentally that the spatial resolution of STEM-based EELS is independent of the energy window width in a range from 10 eV to 60 eV. |
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Authors:
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Shigeto Isakozawa; Kazutoshi Kaji; Konrad Jarausch; Shohei Terada; Norio Baba |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Journal of electron microscopy Volume: 57 ISSN: 1477-9986 ISO Abbreviation: J Electron Microsc (Tokyo) Publication Date: 2008 Apr |
Date Detail:
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Created Date: 2008-03-06 Completed Date: 2008-04-11 Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 7611157 Medline TA: J Electron Microsc (Tokyo) Country: Japan |
Other Details:
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Languages: eng Pagination: 41-5 Citation Subset: IM |
Affiliation:
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Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan. |
Export Citation:
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APA/MLA Format Download EndNote Download BibTex |
| MeSH Terms | |
Descriptor/Qualifier:
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Chromium
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chemistry Microscopy, Electron, Scanning Transmission / instrumentation, methods* Silicon Dioxide / chemistry Spectroscopy, Electron Energy-Loss / instrumentation, methods* Titanium / chemistry |
| Chemical | |
Reg. No./Substance:
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7440-32-6/Titanium; 7440-47-3/Chromium; 7631-86-9/Silicon Dioxide |
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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