Document Detail

The design and analysis of beam-membrane structure sensors for micro-pressure measurement.
MedLine Citation:
PMID:  22559567     Owner:  NLM     Status:  In-Data-Review    
This paper reports the design and analysis of a type of piezoresistive pressure sensor for micro-pressure measurement with a cross beam-membrane (CBM) structure. This new silicon substrate-based sensor has the advantages of a miniature structure and high sensitivity, linearity, and accuracy. By using the finite element method to analyze the stress distribution of the new structure and subsequently deducing the relationship between structural dimensions and mechanical performances, equations used to determine the CBM structure are established. Based on the CBM model and our stress and deflections equations, sensor fabrication is then performed on the silicon wafer via a process including anisotropy chemical etching and inductively coupled plasma. The structure's merits, such as linearity, sensitivity, and repeatability, have been investigated under the pressure of 5 kPa. Our results show that the precision of these equations is ±0.19%FS, indicating that this new small-sized structure offers easy preparation, high sensitivity, and high accuracy for micro-pressure measurement.
Bian Tian; Yulong Zhao; Zhuangde Jiang; Bin Hu
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  The Review of scientific instruments     Volume:  83     ISSN:  1089-7623     ISO Abbreviation:  Rev Sci Instrum     Publication Date:  2012 Apr 
Date Detail:
Created Date:  2012-05-07     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0405571     Medline TA:  Rev Sci Instrum     Country:  United States    
Other Details:
Languages:  eng     Pagination:  045003     Citation Subset:  IM    
The State Key Laboratory for Mechanical Manufacturing System, Xi'an Jiaotong University, Xi'an, Shannxi 710049, China.
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