| White-light scanning interferometer for absolute nano-scale gap thickness measurement. | |
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MedLine Citation:
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PMID: 19687988 Owner: NLM Status: MEDLINE |
Abstract/OtherAbstract:
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A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator of the light source. Compared with the common white-light interferometer our approach avoids the influence of the chromatic dispersion of the planar plates on the gap thickness quantification. It covers a large measurement range of from approximate contact to tens of microns with a high resolution of 0.1 nm. Detailed analytical models are presented and signal-processing algorithms based on convolution and correlation techniques are developed. Practical measurements are carried out and the experimental results match well with the analysis and simulation. Short-time and long-time repeatabilities are both tested to prove the high performance of our method. |
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Authors:
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Zhiguang Xu; Vijay Shilpiekandula; Kamal Youcef-toumi; Soon Fatt Yoon |
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Publication Detail:
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Type: Journal Article; Research Support, Non-U.S. Gov't |
Journal Detail:
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Title: Optics express Volume: 17 ISSN: 1094-4087 ISO Abbreviation: Opt Express Publication Date: 2009 Aug |
Date Detail:
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Created Date: 2009-08-18 Completed Date: 2009-11-16 Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 101137103 Medline TA: Opt Express Country: United States |
Other Details:
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Languages: eng Pagination: 15104-17 Citation Subset: IM |
Copyright Information:
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(c) 2009 Optical Society of America |
Affiliation:
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Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA 02139, USA. zgxu@mit.edu |
Export Citation:
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| MeSH Terms | |
Descriptor/Qualifier:
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Algorithms Computer Simulation Equipment Design Interferometry / methods* Light Models, Theoretical Nanotechnology / methods* Optical Devices Optics and Photonics* Refractometry / methods Scattering, Radiation |
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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