| White-light interferometry on rough surfaces-measurement uncertainty caused by noise. | |
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MedLine Citation:
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PMID: 22307116 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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White-light interferometry on rough surfaces is an optical method for the measurement of the geometrical form of objects. The longitudinal coordinate of the measured surface is obtained from the measured interferogram by means of an evaluation method. However, the longitudinal coordinate cannot be determined completely accurately because the interferogram is affected by noise. We calculate the lower limit of the longitudinal measurement uncertainty caused by noise by use of the Cramer-Rao inequality. Additionally, we calculate the lower limit of the longitudinal measurement uncertainty caused by shot noise only. |
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Authors:
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Pavel Pavliček; Ondřej Hýbl |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 51 ISSN: 1539-4522 ISO Abbreviation: Appl Opt Publication Date: 2012 Feb |
Date Detail:
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Created Date: 2012-02-06 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: 465-73 Citation Subset: IM |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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