Document Detail


Ultrafast web inspection with hybrid dispersion laser scanner.
MedLine Citation:
PMID:  23759858     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
We report an ultrafast web inspector that operates at a 1000 times higher scan rate than conventional methods. This system is based on a hybrid dispersion laser scanner that performs line scans at nearly 100 MHz. Specifically, we demonstrate web inspection with detectable resolution of 48.6  μm/pixel (scan direction) ×  23  μm (web flow direction) within a width of view of 6 mm at a record high scan rate of 90.9 MHz. We demonstrate the identification and evaluation of particles on silicon wafers. This method holds great promise for speeding up quality control and hence reducing manufacturing costs.
Authors:
Hongwei Chen; Chao Wang; Akio Yazaki; Chanju Kim; Keisuke Goda; Bahram Jalali
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  52     ISSN:  1539-4522     ISO Abbreviation:  Appl Opt     Publication Date:  2013 Jun 
Date Detail:
Created Date:  2013-06-13     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  4072-6     Citation Subset:  IM    
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