Document Detail

Towards the Controlled Synthesis of Hexagonal Boron Nitride Films.
MedLine Citation:
PMID:  22702240     Owner:  NLM     Status:  Publisher    
Atomically smooth hexagonal boron nitride (h-BN) layers have very useful properties and thus potential applications for protective coatings, deep ultraviolet (DUV) emitters and as a dielectric for nanoelectronics devices. In this paper we report on the growth of h-BN by a low-pressure chemical vapor deposition (LPCVD) process using diborane and ammonia as the gas precursors. The use of LPCVD allows synthesis of h-BN with a controlled number of layers defined by the growth conditions, temperature, time, and gas partial pressure. Furthermore, few-layer h-BN was also grown by a sequential growth method and insights into the growth mechanism are described, thus forming the basis of future growth of h-BN by atomic layer epitaxy.
Ariel Ismach; Harry Chou; Domingo A Ferrer; Yaping Wu; Stephen McDonnell; Herman C Floresca; Alan Covacevich; Cody Pope; Richard Piner; Moon J Kim; Robert M Wallace; Luigi Colombo; Rodney S Ruoff
Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2012-6-18
Journal Detail:
Title:  ACS nano     Volume:  -     ISSN:  1936-086X     ISO Abbreviation:  -     Publication Date:  2012 Jun 
Date Detail:
Created Date:  2012-6-18     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101313589     Medline TA:  ACS Nano     Country:  -    
Other Details:
Languages:  ENG     Pagination:  -     Citation Subset:  -    
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