Document Detail

Three-dimensional inline inspection for substrate warpage and ball grid array coplanarity using stereo vision.
MedLine Citation:
PMID:  24922032     Owner:  NLM     Status:  Publisher    
We present a method for full-field 3D measurement of substrate warpage and ball grid array coplanarity, which is suitable for inline back-end inspection and process monitoring. For evaluating the performance of the proposed system, the linearity between our system and a reference confocal microscope is studied by repeating measurements 35 times with a particular substrate sample (38  mm×28.5  mm). The point-to-point correlation coefficient with 1σ between two methods is 0.968±0.002, and the 2σ difference is 25.15±0.20  μm for warpage measurement. 1σ repeatability of the substrate warpage is 4.2 μm. For BGA coplanarity inspection the bump level correlation coefficient is 0.957±0.001 and the 2σ difference is 28.79±0.14  μm. 1σ repeatability of BGA coplanarity is 3.7 μm. Data acquisition takes about 0.2 s for full field measurements.
Takeshi Nakazawa; Ayman Samara
Publication Detail:
Journal Detail:
Title:  Applied optics     Volume:  53     ISSN:  1539-4522     ISO Abbreviation:  Appl Opt     Publication Date:  2014 May 
Date Detail:
Created Date:  2014-6-12     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  -    
Other Details:
Languages:  ENG     Pagination:  3101-3109     Citation Subset:  -    
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