| Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists. | |
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MedLine Citation:
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PMID: 22961836 Owner: NLM Status: Publisher |
Abstract/OtherAbstract:
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Star block copolymers are demonstrated for their application as a high-performance resist material. This new resist material shows advanced progress in sensitivity and solubility contrast and is finally combinatorially optimized to achieve a 66 nm line/space pattern. The tailored molecular architecture of the star block copolymer is synthesized via core-first atom transfer radical polymerization (ATRP) and shows narrow polydispersity indices below 1.2. |
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Authors:
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Florian Wieberger; Christian Neuber; Christopher K Ober; Hans-Werner Schmidt |
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Publication Detail:
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Type: JOURNAL ARTICLE Date: 2012-9-7 |
Journal Detail:
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Title: Advanced materials (Deerfield Beach, Fla.) Volume: - ISSN: 1521-4095 ISO Abbreviation: Adv. Mater. Weinheim Publication Date: 2012 Sep |
Date Detail:
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Created Date: 2012-9-10 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 9885358 Medline TA: Adv Mater Country: - |
Other Details:
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Languages: ENG Pagination: - Citation Subset: - |
Copyright Information:
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Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. |
Affiliation:
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Makromolekulare Chemie I, Bayreuther Institut für Makromolekülforschung (BIMF) and Bayreuther Zentrum für Kolloide und Grenzflächen (BZKG), Universität Bayreuth, 95440 Bayreuth, Germany. |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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