Document Detail

Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists.
MedLine Citation:
PMID:  22961836     Owner:  NLM     Status:  Publisher    
Star block copolymers are demonstrated for their application as a high-performance resist material. This new resist material shows advanced progress in sensitivity and solubility contrast and is finally combinatorially optimized to achieve a 66 nm line/space pattern. The tailored molecular architecture of the star block copolymer is synthesized via core-first atom transfer radical polymerization (ATRP) and shows narrow polydispersity indices below 1.2.
Florian Wieberger; Christian Neuber; Christopher K Ober; Hans-Werner Schmidt
Related Documents :
23124746 - Genome-wide enrichment screening reveals multiple targets and resistance genes for tric...
23521586 - Identification of a novel 16s rrna gene variant of actinomyces funkei from six patients...
23425236 - Transfer of escherichia coli o157:h7 to spinach by house flies, musca domestica (dipter...
24396106 - Taxonomy and phylogenetic position of fomitiporia torreyae, a causal agent of trunk rot...
3436316 - Comparative in vitro activity of the two new oral cephalosporin metabolites ro 19-5247 ...
15993406 - Glutathione is required for growth and prespore cell differentiation in dictyostelium.
Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2012-9-7
Journal Detail:
Title:  Advanced materials (Deerfield Beach, Fla.)     Volume:  -     ISSN:  1521-4095     ISO Abbreviation:  Adv. Mater. Weinheim     Publication Date:  2012 Sep 
Date Detail:
Created Date:  2012-9-10     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  9885358     Medline TA:  Adv Mater     Country:  -    
Other Details:
Languages:  ENG     Pagination:  -     Citation Subset:  -    
Copyright Information:
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Makromolekulare Chemie I, Bayreuther Institut für Makromolekülforschung (BIMF) and Bayreuther Zentrum für Kolloide und Grenzflächen (BZKG), Universität Bayreuth, 95440 Bayreuth, Germany.
Export Citation:
APA/MLA Format     Download EndNote     Download BibTex
MeSH Terms

From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine

Previous Document:  Effects of mechanical stimulation induced by compression and medium perfusion on cardiac tissue engi...
Next Document:  Retinoic acid and the transcription factor MafB act together and differentially to regulate aggrecan...