Document Detail

Sub-60 nm nanofluidic channels fabricated by glass-glass bonding.
MedLine Citation:
PMID:  17946140     Owner:  NLM     Status:  MEDLINE    
A simple method is proposed to fabricate channels with a depth in the nanometer range on a borosilicate glass substrate without cost-expensive lithography. Nanochannels are constructed with bulk micromachining by BOE wet etching process. Sub-60 nm deep nanofluidic channels on chip are formed after glass-glass fusion bonding, which are confirmed by using various methods of nanometer scale measurement. The aspect ratio is down to 0.002 in our present experiments. The main advantage of the technique is the transparency of nanochannels, which allows optical fluorescence microscopy to be used for sensitive detection of nanofluidics and microfluidics.
Ke-Pan Liao; Nan-Kuang Yao; Te-Son Kuo
Publication Detail:
Type:  Evaluation Studies; Journal Article    
Journal Detail:
Title:  Conference proceedings : ... Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual Conference     Volume:  1     ISSN:  1557-170X     ISO Abbreviation:  Conf Proc IEEE Eng Med Biol Soc     Publication Date:  2006  
Date Detail:
Created Date:  2007-10-23     Completed Date:  2008-03-13     Revised Date:  2014-08-21    
Medline Journal Info:
Nlm Unique ID:  101243413     Medline TA:  Conf Proc IEEE Eng Med Biol Soc     Country:  United States    
Other Details:
Languages:  eng     Pagination:  2832-5     Citation Subset:  IM    
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MeSH Terms
Equipment Design
Equipment Failure Analysis
Glass / chemistry*
Microfluidic Analytical Techniques / instrumentation*,  methods
Nanostructures / chemistry*,  ultrastructure*
Nanotechnology / instrumentation*,  methods

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