| Study of a novel and simple method of generating binary mask for microprism fabrication. | |
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MedLine Citation:
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PMID: 22330283 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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A new and simple method for generating binary masks for fabrication of gray scale micro-optical elements is proposed and examined. In this technique the main idea is superimposing two or more gratings with slightly different pitches that depend on the considered gray tone level. This causes generation of a chirped binary mask in which the openings widths are changed from a maximum to minimum through considered steps. Furthermore, to show its capability, it was applied to fabricate some microprisms. In addition, influence of proximity gap, and designation parameters on the surface quality were studied. It is shown that surface deterioration is effectively modified by optimizing the designation parameters. In comparison to other techniques, one of the advantages of this method is to have an assortment of pulse modulated masks that are able to create a variety of gray tone levels. Other advantages are ease in designation and implementation, and the fact that surface roughness could be smoothed effectively by aptly optimized parameters. Theoretical approach, simulation works, and experimental results are presented. |
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Authors:
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Arash Sabatyan; Alireza Hemmat |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 51 ISSN: 1539-4522 ISO Abbreviation: Appl Opt Publication Date: 2012 Feb |
Date Detail:
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Created Date: 2012-02-14 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: 525-30 Citation Subset: IM |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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