| Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment. | |
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MedLine Citation:
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PMID: 18795013 Owner: NLM Status: MEDLINE |
Abstract/OtherAbstract:
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Grating beam splitters have been fabricated for soft X-ray Mach- Zehnder interferometer using holographic interference lithography. The grating beam splitter consists of two gratings, one works at X-ray laser wavelength of 13.9 nm with the spatial frequency of 1000 lines/mm as the operation grating, the other works at visible wavelength of 632.8 nm for pre-aligning the X-ray interferometer with the spatial frequency of 22 lines/mm as the pre-alignment grating. The two gratings lie vertically on the same substrate. The main feature of the beam splitter is the use of low-spatial- frequency beat grating of a holographic double frequency grating as the pre-alignment grating of the X-ray interferometer. The grating line parallelism between the two gratings can be judged by observing the diffraction patterns of the pre-alignment grating directly. |
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Authors:
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Ying Liu; Xin Tan; Zhengkun Liu; Xiangdong Xu; Yilin Hong; Shaojun Fu |
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Publication Detail:
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Type: Journal Article; Research Support, Non-U.S. Gov't |
Journal Detail:
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Title: Optics express Volume: 16 ISSN: 1094-4087 ISO Abbreviation: Opt Express Publication Date: 2008 Sep |
Date Detail:
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Created Date: 2008-09-16 Completed Date: 2008-10-30 Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 101137103 Medline TA: Opt Express Country: United States |
Other Details:
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Languages: eng Pagination: 14761-70 Citation Subset: IM |
Affiliation:
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National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, People's Republic of China. liuychch@ustc.edu.cn |
Export Citation:
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| MeSH Terms | |
Descriptor/Qualifier:
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Computer Simulation Computer-Aided Design* Equipment Design Equipment Failure Analysis Holography / instrumentation* Interferometry / instrumentation* Models, Theoretical* Refractometry / instrumentation* X-Ray Diffraction / instrumentation*, methods |
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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