Document Detail

Size- and Orientation-Selective Si Nanowire Growth: Thermokinetic Effects of Nanoscale Plasma Chemistry.
MedLine Citation:
PMID:  23298308     Owner:  NLM     Status:  Publisher    
A multi-scale, multi-phase thermokinetic model is used to show the effective control of the growth orientation of thin Si nanowires for nanoelectronic devices enabled by nanoscale plasma chemistry. It is shown that very thin Si nanowires with [110] growth direction can nucleate at much lower process temperatures and pressures compared to thermal chemical vapor deposition where [111]-directed Si nanowires are predominantly grown. These findings explain a host of experimental results, and offer the possibility of energy- and matter-efficient, size- and orientation-controlled growth of [110] Si nanowires for next-generation nanodevices.
Kostya Ken Ostrikov; Hamid Mehdipour
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Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2013-1-8
Journal Detail:
Title:  Journal of the American Chemical Society     Volume:  -     ISSN:  1520-5126     ISO Abbreviation:  J. Am. Chem. Soc.     Publication Date:  2013 Jan 
Date Detail:
Created Date:  2013-1-9     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  7503056     Medline TA:  J Am Chem Soc     Country:  -    
Other Details:
Languages:  ENG     Pagination:  -     Citation Subset:  -    
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