Document Detail

Six-fold hexagonal symmetric nanostructures with various periodic shapes on GaAs substrates for efficient antireflection and hydrophobic properties.
MedLine Citation:
PMID:  22071365     Owner:  NLM     Status:  In-Data-Review    
We fabricated various periodic nanostructures with a six-fold hexagonal symmetry on gallium arsenide (GaAs) substrates using simple process steps, together with a theoretical analysis of their antireflective properties. Elliptical photoresist (PR) nanopillars, which are inevitably generated by the asymmetric intensity distribution of the laser interference, were converted to rounded lens-like patterns by a thermal reflow process without any additional complex optic systems, thus leading to an exact six-fold hexagonal symmetry. Various shaped periodic nanostructures including nanorods, cones, truncated cones, and even parabolic patterns were obtained under different etching conditions using the rounded lens-like PR patterns formed by the reflow process. For the parabolic structure, the calculated lowest average reflectance of ∼ 2.3% was obtained. To achieve better antireflection characteristics, an aluminum-doped zinc oxide (AZO) film was deposited on the GaAs parabolas, which forms an AZO/GaAs parabolic nanostructure. The structure exhibited a low average reflectance of ∼ 1.2% over a wide wavelength region of 350-1800 nm and a hydrophobic surface with a water contact angle of θ(c) ∼ 115°. The calculated reflectances were reasonably consistent with the measured results.
Jung Woo Leem; Young Min Song; Jae Su Yu
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Publication Detail:
Type:  Journal Article     Date:  2011-11-09
Journal Detail:
Title:  Nanotechnology     Volume:  22     ISSN:  1361-6528     ISO Abbreviation:  Nanotechnology     Publication Date:  2011 Dec 
Date Detail:
Created Date:  2011-11-10     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101241272     Medline TA:  Nanotechnology     Country:  England    
Other Details:
Languages:  eng     Pagination:  485304     Citation Subset:  IM    
Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, Giheung-gu, Yongin-si, Gyeonggi-do 446-701, Republic of Korea.
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