Document Detail

Production of ultra thin silicon foils.
MedLine Citation:
PMID:  21307486     Owner:  NLM     Status:  In-Data-Review    
Ultra thin silicon foils with thicknesses below 100 nm and large diameters have been produced. Foils with a thickness of 50-60 nm have been used as supporting foils for zone plates and as vacuum windows withstanding a pressure difference of 1 atm.
R Medenwaldt; M Hettwer
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Journal of X-ray science and technology     Volume:  5     ISSN:  0895-3996     ISO Abbreviation:  J Xray Sci Technol     Publication Date:  1995 Jan 
Date Detail:
Created Date:  2011-02-10     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  9000080     Medline TA:  J Xray Sci Technol     Country:  Netherlands    
Other Details:
Languages:  eng     Pagination:  202-6     Citation Subset:  -    
Institute for Synchrotron Radiation, Aarhus University, DK-8000 Aarhus C, Denmark.
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