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Parameter characterization of high-overtone bulk acoustic resonators by resonant spectrum method.
MedLine Citation:
PMID:  15982469     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
Effects of electrode on high-overtone bulk acoustic resonator (HBAR) spectra are analyzed by numerical simulation. The figure of merit (FOM), the effective electromechanical coupling factor, k(eff)(2)(m), and the quality factor Q(s) of the unique mode are discussed based on the resonance spectra of the HBAR. It is demonstrated that electrodes with proper acoustic impedance and thickness could improve the performance of the HBAR, or degrade the performance if the electrodes are not properly chosen.
Authors:
Hui Zhang; Shu-Yi Zhang; Kai Zheng
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Publication Detail:
Type:  Journal Article     Date:  2005-03-25
Journal Detail:
Title:  Ultrasonics     Volume:  43     ISSN:  0041-624X     ISO Abbreviation:  Ultrasonics     Publication Date:  2005 Aug 
Date Detail:
Created Date:  2005-06-28     Completed Date:  2005-09-01     Revised Date:  2009-11-11    
Medline Journal Info:
Nlm Unique ID:  0050452     Medline TA:  Ultrasonics     Country:  Netherlands    
Other Details:
Languages:  eng     Pagination:  635-42     Citation Subset:  -    
Affiliation:
Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, PR China. paslabw@nju.edu.cn
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