| Optical component interface scatter characterization by selective polarization extinction. | |
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MedLine Citation:
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PMID: 21460962 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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A procedure for the selective extinction of the scattered light based on "null ellipsometry" [R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977)] is presented. The technique allows scattering measurement from individual layers of a multilayer component by extinguishing the scattered light from the other layer interfaces. The technique is easily applicable to multilayer components with nearly identical surface profiles at every interface and little significant bulk scattering. Analysis is provided to determine the conditions required to extinguish the light from the excluded interfaces isolating the scattered light from the desired interface. An analysis of sensitivity of the extinction conditions to experimental parameters and to layer optical thickness is also provided. Experimental data collected using the technique are compared with measurements made using a white-light optical surface profilometry. |
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Authors:
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Gaëlle Georges; Carole Deumié; Claude Amra |
Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 50 ISSN: 1539-4522 ISO Abbreviation: Appl Opt Publication Date: 2011 Mar |
Date Detail:
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Created Date: 2011-04-04 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: C349-56 Citation Subset: IM |
Export Citation:
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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