| Optical accelerometer based on grating interferometer with phase modulation technique. | |
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MedLine Citation:
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PMID: 23052079 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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In this paper, an optical accelerometer based on grating interferometer with phase modulation technique is proposed. This device architecture consists of a laser diode, a sensing chip and an optoelectronic processing circuit. The sensing chip is a sandwich structure, which is composed of a grating, a piezoelectric translator and a micromachined silicon structure consisting of a proof mass and four cantilevers. The detected signal is intensity-modulated with phase modulation technique and processed with a lock-in amplifier for demodulation. Experimental results show that this optical accelerometer has acceleration sensitivity of 619 V/g and high-resolution acceleration detection of 3 μg in the linear region. |
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Authors:
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Shuangshuang Zhao; Juan Zhang; Changlun Hou; Jian Bai; Guoguang Yang |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 51 ISSN: 1539-4522 ISO Abbreviation: Appl Opt Publication Date: 2012 Oct |
Date Detail:
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Created Date: 2012-10-11 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: 7005-10 Citation Subset: IM |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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