Document Detail


Optical accelerometer based on grating interferometer with phase modulation technique.
MedLine Citation:
PMID:  23052079     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
In this paper, an optical accelerometer based on grating interferometer with phase modulation technique is proposed. This device architecture consists of a laser diode, a sensing chip and an optoelectronic processing circuit. The sensing chip is a sandwich structure, which is composed of a grating, a piezoelectric translator and a micromachined silicon structure consisting of a proof mass and four cantilevers. The detected signal is intensity-modulated with phase modulation technique and processed with a lock-in amplifier for demodulation. Experimental results show that this optical accelerometer has acceleration sensitivity of 619  V/g and high-resolution acceleration detection of 3 μg in the linear region.
Authors:
Shuangshuang Zhao; Juan Zhang; Changlun Hou; Jian Bai; Guoguang Yang
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  51     ISSN:  1539-4522     ISO Abbreviation:  Appl Opt     Publication Date:  2012 Oct 
Date Detail:
Created Date:  2012-10-11     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  7005-10     Citation Subset:  IM    
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