| Note: Design of a novel ultraprecision in-plane XYθ positioning stage. | |
| | |
MedLine Citation:
|
PMID: 21361641 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
|
This paper presents the design, fabrication, and experimental results of a novel ultraprecision in-plane XYθ positioning stage with kinematic decoupling between translational motion and rotational motion components. Two translational motions are guided by four cymbal mechanisms that have both motion guide and motion amplifier. Four leaf springs guide a rotational motion amplified by a Scott-Russell linkage mechanism. The proposed stage has advantages such as an in-plane symmetrical configuration as well as ease of design and control by serial kinematics. The experimental results demonstrate that the stage has a translational full motion range of 58 μm and a rotational full motion range of 1.05 mrad. The crosstalk experimental results show good agreement with the theoretical prediction of the decoupling between translational motion and rotational motion. |
| | |
Authors:
|
Donghyun Hwang; Moon G Lee; Jaehwa Jeong |
Publication Detail:
|
Type: Journal Article |
Journal Detail:
|
Title: The Review of scientific instruments Volume: 82 ISSN: 1089-7623 ISO Abbreviation: Rev Sci Instrum Publication Date: 2011 Feb |
Date Detail:
|
Created Date: 2011-03-02 Completed Date: - Revised Date: - |
Medline Journal Info:
|
Nlm Unique ID: 0405571 Medline TA: Rev Sci Instrum Country: United States |
Other Details:
|
Languages: eng Pagination: 026102 Citation Subset: IM |
Affiliation:
|
Department of Mechanical Engineering, Ajou University, Woncheon-dong, Suwon 443-749, Republic of KoreaDepartment of Control and Instrumentation Engineering, Korea University, 208 Seochang-Ri, Jochiwon-Eup,Youngi-Gun, Chungnam 339-700, Republic of Korea. |
Export Citation:
|
APA/MLA Format Download EndNote Download BibTex |
| MeSH Terms | |
Descriptor/Qualifier:
|
|
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
Previous Document: Note: Production of sharp gold tips with high surface quality.
Next Document: Note: Observation and analysis of the aberration in a photoacoustic imaging system.