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Normal vector method for the RCWA with automated vector field generation.
MedLine Citation:
PMID:  18958012     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
Early formulations of the RCWA yield, implicated by the erroneous application of factorization rules to discrete Fourier transformations, poor convergence in certain cases. An explanation for this finding and an approach to overcome the problem for crossed gratings was first given by Li [J. Opt. Soc. Am. A 13, 1870 (1996) and 14, 2758 (1997)]. A further improvement was achieved by Schuster et al. [J. Opt. Soc. Am. A 24, 2880 (2007)], using a structure dependent normal vector (NV) field. While it is trivial to create those NV fields for simple geometrical shapes, to our knowledge an appropriate algorithm for arbitrary shapes does not exist, yet. In this work we present such an algorithm.
Authors:
Peter Götz; Thomas Schuster; Karsten Frenner; Stephan Rafler; Wolfgang Osten
Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Optics express     Volume:  16     ISSN:  1094-4087     ISO Abbreviation:  Opt Express     Publication Date:  2008 Oct 
Date Detail:
Created Date:  2008-10-29     Completed Date:  2008-12-08     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101137103     Medline TA:  Opt Express     Country:  United States    
Other Details:
Languages:  eng     Pagination:  17295-301     Citation Subset:  -    
Affiliation:
Institut für Technische Optik, Universität Stuttgart, Germany.
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