| Nonlithographic patterning and metal-assisted chemical etching for manufacturing of tunable light-emitting silicon nanowire arrays. | |
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MedLine Citation:
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PMID: 20423044 Owner: NLM Status: MEDLINE |
Abstract/OtherAbstract:
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Semiconductor nanowires have potential applications in photovoltaics, batteries, and thermoelectrics. We report a top-down fabrication method that involves the combination of superionic-solid-state-stamping (S4) patterning with metal-assisted-chemical-etching (MacEtch), to produce silicon nanowire arrays with defined geometry and optical properties in a manufacturable fashion. Strong light emission in the entire visible and near infrared wavelength range at room temperature, tunable by etching condition, attributed to surface features, and enhanced by silver surface plasmon, is demonstrated. |
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Authors:
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Winston Chern; Keng Hsu; Ik Su Chun; Bruno P de Azeredo; Numair Ahmed; Kyou-Hyun Kim; Jian-min Zuo; Nick Fang; Placid Ferreira; Xiuling Li |
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Publication Detail:
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Type: Journal Article; Research Support, U.S. Gov't, Non-P.H.S. |
Journal Detail:
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Title: Nano letters Volume: 10 ISSN: 1530-6992 ISO Abbreviation: Nano Lett. Publication Date: 2010 May |
Date Detail:
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Created Date: 2010-05-13 Completed Date: 2010-09-13 Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 101088070 Medline TA: Nano Lett Country: United States |
Other Details:
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Languages: eng Pagination: 1582-8 Citation Subset: IM |
Affiliation:
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Center for Nanoscale Chemical-Electrical-Mechanical Manufacturing Systems, University of Illinois, Urbana, Illinois 61822, USA. |
Export Citation:
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APA/MLA Format Download EndNote Download BibTex |
| MeSH Terms | |
Descriptor/Qualifier:
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Crystallization
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methods* Equipment Design Equipment Failure Analysis Lighting / instrumentation* Materials Testing Molecular Conformation Nanostructures / chemistry*, ultrastructure* Nanotechnology / instrumentation* Particle Size Semiconductors Silicon / chemistry* Silver / chemistry* Surface Properties |
| Chemical | |
Reg. No./Substance:
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7440-21-3/Silicon; 7440-22-4/Silver |
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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