| Microsystem technology as a road from macro to nanoworld. | |
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MedLine Citation:
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PMID: 15912602 Owner: NLM Status: MEDLINE |
Abstract/OtherAbstract:
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Tremendous progress of microelectronic technology observed within last 40 years is closely related to even more remarkable progress of technological tools. It is important to note however, that these new tools may be used for fabrication of diverse multifunctional structures as well. Such devices, called MEMS (Micro-Electro-Mechanical-System) and MOEMS (Micro-Electro-Opto-Mechanical-System) integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application, with most interesting and prospective being bio-medical investigations. Development of these applications requires however cooperation of multidisciplinary team of specialists, covering broad range of physics, (bio) chemistry and electronics, not mentioning medical doctors and other medical specialists. Thus, dissemination, of knowledge about existing processing capabilities is of key importance. In this paper, examples of various applications of microelectronic technology for fabrication of Microsystems which may be used for medicine and chemistry, will be presented. Besides, information concerning a design and technology potential available in poland and new, emerging opportunities will be given. |
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Authors:
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Piotr Grabiec; Krzysztof Domański; Paweł Janus; Michał Zaborowski; Bogdan Jaroszewicz |
Publication Detail:
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Type: Journal Article; Review |
Journal Detail:
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Title: Bioelectrochemistry (Amsterdam, Netherlands) Volume: 66 ISSN: 1567-5394 ISO Abbreviation: Bioelectrochemistry Publication Date: 2005 Apr |
Date Detail:
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Created Date: 2005-05-23 Completed Date: 2005-08-25 Revised Date: 2005-11-16 |
Medline Journal Info:
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Nlm Unique ID: 100953583 Medline TA: Bioelectrochemistry Country: Netherlands |
Other Details:
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Languages: eng Pagination: 23-8 Citation Subset: IM |
Affiliation:
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Silicon Microsystem and Nanostructure Technology Department, Institute of Electron Technology, Al. Lotników 32/46, Warsaw 02-668, Poland. grabiec@ite.waw.pl |
Export Citation:
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| MeSH Terms | |
Descriptor/Qualifier:
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Microchemistry
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instrumentation* Microelectrodes Microscopy, Electron, Scanning Nanotechnology* / methods Surface Properties |
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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