Document Detail

Micromachined severinghaus-type carbon dioxide electrode.
MedLine Citation:
PMID:  21662815     Owner:  NLM     Status:  In-Data-Review    
The Severinghaus-type pCO(2) electrode was miniaturized and batch-fabricated using semiconductor and micromachining techniques. Anodically grown iridium oxide film (AIROF) was employed as the pH sensing element to detect a local pH change caused by the infusion of CO(2). The AIROF showed a super-Nernstian response with a slope of approximately -80 mV/pH at 25 °C. A novel thin-film Ag/AgCl structure was also used. It features a hydrophobic membrane which covers the entire silver layer and the AgCl layer grown from the periphery of the silver pattern. The open-circuit potential of the Ag/AgCl element drifted to the negative side at -0.1 to -0.2 mV h(-1). A microcavity in which the electrolyte solution was filled was anisotropically etched in a silicon substrate, and a silicone rubber gas-permeable membrane was formed on the sensitive area. The miniature pCO(2) electrode showed a distinct response to the variation in concentration of dissolved CO(2). The inherent characteristics of the Severinghaus electrode were confirmed in terms of its response and calibration curve. The selectivity of the electrode was satisfactory in view of its application to clinical analysis.
H Suzuki; H Arakawa; S Sasaki; I Karube
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Analytical chemistry     Volume:  71     ISSN:  0003-2700     ISO Abbreviation:  Anal. Chem.     Publication Date:  1999 May 
Date Detail:
Created Date:  2011-06-13     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0370536     Medline TA:  Anal Chem     Country:  United States    
Other Details:
Languages:  eng     Pagination:  1737-43     Citation Subset:  -    
Institute of Materials Science, University of Tsukuba, 1-1-1 Tennodai, Tsukuba Science City, 305-8573, Japan.
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