Document Detail


Magnetically actuated MEMS microlens scanner for in vivo medical imaging.
MedLine Citation:
PMID:  19547470     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
A magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane (PDMS) microlens is demonstrated. The device is driven by an external AC magnetic field, eliminating chip circuitry and thermal deformation from joule heating. The resonant frequency of 215.2 Hz and scanning angle of 23 of the scanner have been demonstrated. Experimental studies and optical modeling have shown that this microlens scanner achieves a scanning range of 125 mum when actuated by an external magnetic field of 22.2x10-3 Tesla flux density. The device has potential applications in in vivo medical imaging for minimally invasive diagnoses.
Authors:
Chin Pang Billy Siu; Haishan Zeng; Mu Chiao
Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Optics express     Volume:  15     ISSN:  1094-4087     ISO Abbreviation:  Opt Express     Publication Date:  2007 Sep 
Date Detail:
Created Date:  2009-06-23     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101137103     Medline TA:  Opt Express     Country:  United States    
Other Details:
Languages:  eng     Pagination:  11154-66     Citation Subset:  -    
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