| Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation. | |
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MedLine Citation:
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PMID: 14528922 Owner: NLM Status: PubMed-not-MEDLINE |
Abstract/OtherAbstract:
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Photodiodes are used as easy-to-operate detectors in the extreme-ultraviolet spectral range. At the Physikalisch-Technische Bundesanstalt photodiodes are calibrated with an uncertainty of spectral responsivity of 0.3% or less. Stable photodiodes are a prerequisite for the dissemination of these high-accuracy calibrations to customers. Silicon photodiodes with different top layers were exposed to intense extreme-ultraviolet irradiation. Diodes coated with diamondlike carbon or TiSiN proved to be stable within a few percent up to a radiant exposure of 100 kJ/cm2. The changes in responsivity could be explained as being due to carbon contamination and to changes in the internal charge collection efficiency. In ultrahigh vacuum, no indication of oxidation was found. |
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Authors:
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Frank Scholze; Roman Klein; Thomas Bock |
Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 42 ISSN: 0003-6935 ISO Abbreviation: Appl Opt Publication Date: 2003 Oct |
Date Detail:
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Created Date: 2003-10-07 Completed Date: 2003-11-07 Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: 5621-6 Citation Subset: - |
Affiliation:
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Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12, 10587 Berlin, Germany. frank.scholze@ptb.de |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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