Document Detail

Irradiation stability of silicon photodiodes for extreme-ultraviolet radiation.
MedLine Citation:
PMID:  14528922     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Photodiodes are used as easy-to-operate detectors in the extreme-ultraviolet spectral range. At the Physikalisch-Technische Bundesanstalt photodiodes are calibrated with an uncertainty of spectral responsivity of 0.3% or less. Stable photodiodes are a prerequisite for the dissemination of these high-accuracy calibrations to customers. Silicon photodiodes with different top layers were exposed to intense extreme-ultraviolet irradiation. Diodes coated with diamondlike carbon or TiSiN proved to be stable within a few percent up to a radiant exposure of 100 kJ/cm2. The changes in responsivity could be explained as being due to carbon contamination and to changes in the internal charge collection efficiency. In ultrahigh vacuum, no indication of oxidation was found.
Frank Scholze; Roman Klein; Thomas Bock
Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  42     ISSN:  0003-6935     ISO Abbreviation:  Appl Opt     Publication Date:  2003 Oct 
Date Detail:
Created Date:  2003-10-07     Completed Date:  2003-11-07     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  5621-6     Citation Subset:  -    
Physikalisch-Technische Bundesanstalt, Abbestrasse 2-12, 10587 Berlin, Germany.
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