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Iron silicide root formation in carbon nanotubes grown by microwave PECVD.
MedLine Citation:
PMID:  16375415     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
Aligned carbon nanotubes have been grown using microwave plasma enhanced chemical vapor deposition (PECVD). The carbon nanotubes are nucleated from iron catalyst particles which, during growth, remain adherent to the silicon substrates. By analysis with high-resolution electron microscopy, we observe iron silicide roots penetrating into the silicon substrate at the interface of the catalyst particles and the substrate, thus providing strong adhesion of the carbon nanotubes onto the substrate. The iron silicide roots assist in the attachment of the catalyst particles to the substrate and play a role in the evolution of the catalyst particle morphology and resulting base growth mode. Carbon nanotubes grown by microwave PECVD could exhibit superior electrical and thermal transport properties over other PECVD processes, so an understanding of the growth mechanism is important for utilization in device applications.
Authors:
Joseph F AuBuchon; Chiara Daraio; Li-Han Chen; Andrew I Gapin; Sungho Jin
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  The journal of physical chemistry. B     Volume:  109     ISSN:  1520-6106     ISO Abbreviation:  J Phys Chem B     Publication Date:  2005 Dec 
Date Detail:
Created Date:  2005-12-26     Completed Date:  2006-08-08     Revised Date:  2007-03-23    
Medline Journal Info:
Nlm Unique ID:  101157530     Medline TA:  J Phys Chem B     Country:  United States    
Other Details:
Languages:  eng     Pagination:  24215-9     Citation Subset:  -    
Affiliation:
Materials Science and Engineering Program, Mechanical and Aerospace Engineering Department, University of California-San Diego, La Jolla, California 92093-0411, USA.
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