Document Detail


Impact of LOCOS techniques on photonic wire waveguides.
MedLine Citation:
PMID:  23052089     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
We use the LOCal oxidation of silicon (LOCOS) method as a fabrication technique to define submicrometer photonic waveguides. We attempted fabricating the wire waveguides with two different masking processes, one with a stack of pad oxide and silicon nitride layers, and the other with a single silicon nitride layer. The smallest waveguide we achieved had a cross-section profile of 280  nm×650  nm. The propagation loss of the waveguides was measured by the cut-back method, and the bending loss was measured by employing the serpentine pattern. The minimum propagation loss achieved was 8.78  dB/cm and the bending loss was 0.0089  dB/90° bend for a 5 μm bending radius.
Authors:
Yule Xiong; Marc Ibrahim; Winnie N Ye
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  51     ISSN:  1539-4522     ISO Abbreviation:  Appl Opt     Publication Date:  2012 Oct 
Date Detail:
Created Date:  2012-10-11     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  7089-93     Citation Subset:  IM    
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