Document Detail

High-sensitivity Fabry-Perot interferometric pressure sensor based on a nanothick silver diaphragm.
MedLine Citation:
PMID:  22854444     Owner:  NLM     Status:  In-Data-Review    
We present a fiber-optic extrinsic Fabry-Perot interferometer pressure sensor based on a nanothick silver diaphragm. The sensing diaphragm, with a thickness measured in a few hundreds of nanometers, is fabricated by the electroless plating method, which provides a simple fabrication process involving a high-quality diaphragm at a low cost. The sensor exhibits a relatively linear response within the pressure variation range of 0-50 kPa, with a high pressure sensitivity of 70.5 nm/kPa. This sensor is expected to have potential applications in the field of highly sensitive pressure sensors.
Feng Xu; Dongxu Ren; Xiaolong Shi; Can Li; Weiwei Lu; Lu Lu; Liang Lu; Benli Yu
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Optics letters     Volume:  37     ISSN:  1539-4794     ISO Abbreviation:  Opt Lett     Publication Date:  2012 Jan 
Date Detail:
Created Date:  2012-08-02     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  7708433     Medline TA:  Opt Lett     Country:  United States    
Other Details:
Languages:  eng     Pagination:  133-5     Citation Subset:  IM    
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