Document Detail

High resolution UV roll-to-roll nanoimprinting of resin moulds and subsequent replication via thermal nanoimprint lithography.
MedLine Citation:
PMID:  23138479     Owner:  NLM     Status:  Publisher    
UV roll-to-roll nanoimprinting at high resolution is still a relatively unexplored field of study with far-reaching application potential. One enabling technology that is particularly worthy of attention is mass production of high resolution resin moulds via UV roll-to-roll nanoimprinting at such high throughput and low cost that they can be used only once and disposed of or recycled economically. Low cost, high resolution resin moulds can greatly improve the production cost profile for a number of applications in biomedicine, nanofluidics, data storage and electronics with relatively low unit values but which require one or more nanoscale lithography steps. In this report, UV roll-to-roll nanoimprinting was employed to fabricate high fidelity resin moulds with nanoscale as well as mixed micro- and nanoscale features down to 50 nm feature diameter, at up to 120 cm(2) area and at 10 m min(-1) throughput. UV roll-to-roll nanoimprinted resin moulds were subsequently segmented out, employed in a batch mode thermal nanoimprinting process, and characterized to study performance and demonstrate viability. The results show that high resolution mixed nanostructures can be faithfully replicated in PMMA on silicon substrates with minimal volumetric shrinkage. Process details and challenges specific to roll-to-roll fabrication of resin moulds are discussed at length, particularly with respect to the curvature uniformity of the imprint roller.
Jarrett J Dumond; Kambiz Ansari Mahabadi; Yew Sok Yee; Christina Tan; Jerry Ying Hsi Fuh; Heow Pueh Lee; Hong Yee Low
Related Documents :
25035489 - Electro-optical frequency division and stable microwave synthesis.
24069169 - The effect of contact angles and capillary dimensions on the burst frequency of super h...
17677069 - Crossover behavior and multistep relaxation in a schematic model of the cut-off glass t...
24908029 - Molecular dynamics simulation of electrokinetic flow of an aqueous electrolyte solution...
24690449 - Comparison and analysis of three different methods to evaluate vertical jump height.
23381249 - Ultrasonic sensor employing two cascaded phase-shifted fiber bragg gratings suitable fo...
21085299 - Clinical determination of tissue optical properties by endoscopic spatially resolved re...
21090779 - Binary mixture of nonadditive hard spheres adsorbed in a slit pore: a study of the popu...
17821369 - Multiple-scale convection in the earth's mantle: a three-dimensional study.
Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2012-11-09
Journal Detail:
Title:  Nanotechnology     Volume:  23     ISSN:  1361-6528     ISO Abbreviation:  Nanotechnology     Publication Date:  2012 Nov 
Date Detail:
Created Date:  2012-11-9     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101241272     Medline TA:  Nanotechnology     Country:  -    
Other Details:
Languages:  ENG     Pagination:  485310     Citation Subset:  -    
Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Block EA, 07-08, 117576, Singapore. Institute of Materials Research and Engineering, 3 Research Link, 117602, Singapore.
Export Citation:
APA/MLA Format     Download EndNote     Download BibTex
MeSH Terms

From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine

Previous Document:  Analysis of genetic correlations of hip height with selection indices and mature weight in Nelore ca...
Next Document:  Onconephrology: the latest frontier in the war against kidney disease.