| Gray-scale photolithography using microfluidic photomasks. | |
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MedLine Citation:
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PMID: 12574512 Owner: NLM Status: PubMed-not-MEDLINE |
Abstract/OtherAbstract:
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The ability to produce three-dimensional (3D) microstructures is of increasing importance in the miniaturization of mechanical or fluidic devices, optical elements, self-assembling components, and tissue-engineering scaffolds, among others. Traditional photolithography, the most widely used process for microdevice fabrication, is ill-suited for 3D fabrication, because it is based on the illumination of a photosensitive layer through a "photomask" (a transparent plate that contains opaque, unalterable solid-state features), which inevitably results in features of uniform height. We have devised photomasks in which the light-absorbing features are made of fluids. Unlike in conventional photomasks, the opacity of the photomask features can be tailored to an arbitrary number of gray-scale levels, and their spatial pattern can be reconfigured in the time scale of seconds. Here we demonstrate the inexpensive fabrication of photoresist patterns that contain features of multiple and/or smoothly varying heights. For a given microfluidic photomask, the developed photoresist pattern can be predicted as a function of the dye concentrations and photomask dimensions. For selected applications, microfluidic photomasks offer a low-cost alternative to present gray-scale photolithography approaches. |
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Authors:
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Chihchen Chen; Danny Hirdes; Albert Folch |
Publication Detail:
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Type: Journal Article Date: 2003-02-06 |
Journal Detail:
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Title: Proceedings of the National Academy of Sciences of the United States of America Volume: 100 ISSN: 0027-8424 ISO Abbreviation: Proc. Natl. Acad. Sci. U.S.A. Publication Date: 2003 Feb |
Date Detail:
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Created Date: 2003-02-19 Completed Date: 2003-04-01 Revised Date: 2010-09-14 |
Medline Journal Info:
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Nlm Unique ID: 7505876 Medline TA: Proc Natl Acad Sci U S A Country: United States |
Other Details:
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Languages: eng Pagination: 1499-504 Citation Subset: - |
Affiliation:
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Department of Bioengineering, University of Washington, Seattle, WA 98195, USA. |
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