| Flat microwave-powered ultraviolet source. | |
MedLine Citation:
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PMID: 20577316 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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A microwave-powered ultraviolet source capable of covering an area as large as a 150-mm Si wafer is developed. Fifteen low pressure mercury discharge lamps are arrayed in a flat microwave cavity. The Hg 254-nm irradiance on the surface 1 cm from the lamps is 120 mW/cm(2) at a microwave power of 1200 W. This UV source is used for photoresist removal. Low pressure cadmium lamps, which have the Cd 229-nm irradiance of 13.9 mW/cm(2) at 1 cm for a 500-W input, are also investigated. |
Authors:
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T Ono; S Murayama |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Applied optics Volume: 29 ISSN: 0003-6935 ISO Abbreviation: Appl Opt Publication Date: 1990 Sep |
Date Detail:
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Created Date: 2010-06-25 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0247660 Medline TA: Appl Opt Country: United States |
Other Details:
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Languages: eng Pagination: 3934-7 Citation Subset: - |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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