Document Detail


Flat microwave-powered ultraviolet source.
MedLine Citation:
PMID:  20577316     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
A microwave-powered ultraviolet source capable of covering an area as large as a 150-mm Si wafer is developed. Fifteen low pressure mercury discharge lamps are arrayed in a flat microwave cavity. The Hg 254-nm irradiance on the surface 1 cm from the lamps is 120 mW/cm(2) at a microwave power of 1200 W. This UV source is used for photoresist removal. Low pressure cadmium lamps, which have the Cd 229-nm irradiance of 13.9 mW/cm(2) at 1 cm for a 500-W input, are also investigated.
Authors:
T Ono; S Murayama
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  29     ISSN:  0003-6935     ISO Abbreviation:  Appl Opt     Publication Date:  1990 Sep 
Date Detail:
Created Date:  2010-06-25     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  3934-7     Citation Subset:  -    
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