Document Detail


Fast surface profiling by spectral analysis of white-light interferograms with fourier transform spectroscopy.
MedLine Citation:
PMID:  18273086     Owner:  NLM     Status:  In-Data-Review    
Abstract/OtherAbstract:
We present a fast white-light interference method for measuring surface depth profiles at nanometer scales. Previously reported white-light profilers have relied either on path difference scanning or on spectral analysis of the reflection from a fixed interferometer. We show that by performing this spectral analysis with an imaging Fourier transform spectrometer, the high speed of spectral techniques may be combined with the simple data interpretation characteristic of the scanning method. Giving experimental results from a profiler based on this principle, we show that real-time visualization of surface profiles is possible and we report measurements with a repeatability of approximately 5 nm rms. We also demonstrate good agreement with stylus profiler measurements.
Authors:
M Hart; D G Vass; M L Begbie
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  37     ISSN:  0003-6935     ISO Abbreviation:  Appl Opt     Publication Date:  1998 Apr 
Date Detail:
Created Date:  2008-02-14     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  1764-9     Citation Subset:  -    
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