Document Detail

Fast computation of constructive and destructive interference areas in partially coherent imaging for resolution enhancement in optical microlithography.
MedLine Citation:
PMID:  19277072     Owner:  NLM     Status:  PubMed-not-MEDLINE    
We present a method to determine constructive and destructive interference areas on the object plane in partially coherent imaging. This method is based on the interference pattern on the image plane. A function Gamma that shows constructive and destructive interference areas with respect to the origin on the object plane is derived as the product of mutual intensity on the object plane and the Fourier transform of the pupil function. The convolution integral of Gamma and object transmittance gives the constructive and destructive interference areas. Experimental results show that small clear openings placed at constructive interference areas enhance light intensity at desired positions. By applying this method to optical microlithography imaging, one can achieve resolution enhancement of fine features with a relatively small amount of computation.
Kenji Yamazoe; Yoshiyuki Sekine; Tokuyuki Honda
Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  48     ISSN:  1539-4522     ISO Abbreviation:  Appl Opt     Publication Date:  2009 Mar 
Date Detail:
Created Date:  2009-03-11     Completed Date:  2009-06-02     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  1419-24     Citation Subset:  -    
Department of Electrical Engineering and Computer Science,University of California, Berkeley, 231 Cory Hall, Berkeley, California 94720-1770, USA.
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