Document Detail


Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists.
MedLine Citation:
PMID:  22454580     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
A novel plastic packaging of a piezoresistive pressure sensor using a patterned ultra-thick photoresist is experimentally and theoretically investigated. Two pressure sensor packages of the sacrifice-replacement and dam-ring type were used in this study. The characteristics of the packaged pressure sensors were investigated by using a finite-element (FE) model and experimental measurements. The results show that the thermal signal drift of the packaged pressure sensor with a small sensing-channel opening or with a thin silicon membrane for the dam-ring approach had a high packaging induced thermal stress, leading to a high temperature coefficient of span (TCO) response of -0.19% span/°C. The results also show that the thermal signal drift of the packaged pressure sensors with a large sensing-channel opening for sacrifice-replacement approach significantly reduced packaging induced thermal stress, and hence a low TCO response of -0.065% span/°C. However, the packaged pressure sensors of both the sacrifice-replacement and dam-ring type still met the specification -0.2% span/°C of the unpackaged pressure sensor. In addition, the size of proposed packages was 4 × 4 × 1.5 mm(3) which was about seven times less than the commercialized packages. With the same packaging requirement, the proposed packaging approaches may provide an adequate solution for use in other open-cavity sensors, such as gas sensors, image sensors, and humidity sensors.
Authors:
Lung-Tai Chen; Jin-Sheng Chang; Chung-Yi Hsu; Wood-Hi Cheng
Publication Detail:
Type:  Journal Article     Date:  2009-08-05
Journal Detail:
Title:  Sensors (Basel, Switzerland)     Volume:  9     ISSN:  1424-8220     ISO Abbreviation:  Sensors (Basel)     Publication Date:  2009  
Date Detail:
Created Date:  2012-03-28     Completed Date:  2012-09-10     Revised Date:  2013-05-29    
Medline Journal Info:
Nlm Unique ID:  101204366     Medline TA:  Sensors (Basel)     Country:  Switzerland    
Other Details:
Languages:  eng     Pagination:  6200-18     Citation Subset:  -    
Affiliation:
Micro-System Technology Center, Industrial Technology Research Institute. 709 Tainan, Taiwan; E-Mails: rexchen@itri.org.tw (L.T.C.); jimmychang@itri.org.tw (J.S.C.); enoshhsu@itri.org.tw (C.Y.H.).
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