| Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists. | |
| | |
MedLine Citation:
|
PMID: 22454580 Owner: NLM Status: PubMed-not-MEDLINE |
Abstract/OtherAbstract:
|
A novel plastic packaging of a piezoresistive pressure sensor using a patterned ultra-thick photoresist is experimentally and theoretically investigated. Two pressure sensor packages of the sacrifice-replacement and dam-ring type were used in this study. The characteristics of the packaged pressure sensors were investigated by using a finite-element (FE) model and experimental measurements. The results show that the thermal signal drift of the packaged pressure sensor with a small sensing-channel opening or with a thin silicon membrane for the dam-ring approach had a high packaging induced thermal stress, leading to a high temperature coefficient of span (TCO) response of -0.19% span/°C. The results also show that the thermal signal drift of the packaged pressure sensors with a large sensing-channel opening for sacrifice-replacement approach significantly reduced packaging induced thermal stress, and hence a low TCO response of -0.065% span/°C. However, the packaged pressure sensors of both the sacrifice-replacement and dam-ring type still met the specification -0.2% span/°C of the unpackaged pressure sensor. In addition, the size of proposed packages was 4 × 4 × 1.5 mm(3) which was about seven times less than the commercialized packages. With the same packaging requirement, the proposed packaging approaches may provide an adequate solution for use in other open-cavity sensors, such as gas sensors, image sensors, and humidity sensors. |
| | |
Authors:
|
Lung-Tai Chen; Jin-Sheng Chang; Chung-Yi Hsu; Wood-Hi Cheng |
Publication Detail:
|
Type: Journal Article Date: 2009-08-05 |
Journal Detail:
|
Title: Sensors (Basel, Switzerland) Volume: 9 ISSN: 1424-8220 ISO Abbreviation: Sensors (Basel) Publication Date: 2009 |
Date Detail:
|
Created Date: 2012-03-28 Completed Date: 2012-09-10 Revised Date: 2013-05-29 |
Medline Journal Info:
|
Nlm Unique ID: 101204366 Medline TA: Sensors (Basel) Country: Switzerland |
Other Details:
|
Languages: eng Pagination: 6200-18 Citation Subset: - |
Affiliation:
|
Micro-System Technology Center, Industrial Technology Research Institute. 709 Tainan, Taiwan; E-Mails: rexchen@itri.org.tw (L.T.C.); jimmychang@itri.org.tw (J.S.C.); enoshhsu@itri.org.tw (C.Y.H.). |
Export Citation:
|
APA/MLA Format Download EndNote Download BibTex |
| MeSH Terms | |
Descriptor/Qualifier:
|
|
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
Previous Document: Amperometric hydrogen peroxide biosensor based on immobilization of hemoglobin on a glassy carbon el...
Next Document: Manufacture of Micromirror Arrays Using a CMOS-MEMS Technique.