Document Detail


Fabrication and characteristics of an nc-Si/c-Si heterojunction MOSFETs pressure sensor.
MedLine Citation:
PMID:  22778646     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of the four nc-Si/c-Si heterojunction MOSFETs form a Wheatstone bridge. When the additional pressure is P, the nc-Si/c-Si heterojunction MOSFETs pressure sensor can measure this additional pressure P. The experimental results show that when the supply voltage is 3 V, length-width (L:W) ratio is 2:1, and the silicon membrane thickness is 75 μm, the full scale output voltage of the pressure sensor is 15.50 mV at room temperature, and pressure sensitivity is 0.097 mV/kPa. When the supply voltage and L:W ratio are the same as the above, and the silicon membrane thickness is 45 μm, the full scale output voltage is 43.05 mV, and pressure sensitivity is 2.153 mV/kPa. Therefore, the sensor has higher sensitivity and good temperature characteristics compared to the traditional piezoresistive pressure sensor.
Authors:
Xiaofeng Zhao; Dianzhong Wen; Gang Li
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Publication Detail:
Type:  Journal Article     Date:  2012-05-14
Journal Detail:
Title:  Sensors (Basel, Switzerland)     Volume:  12     ISSN:  1424-8220     ISO Abbreviation:  Sensors (Basel)     Publication Date:  2012  
Date Detail:
Created Date:  2012-07-10     Completed Date:  2012-11-01     Revised Date:  2013-05-30    
Medline Journal Info:
Nlm Unique ID:  101204366     Medline TA:  Sensors (Basel)     Country:  Switzerland    
Other Details:
Languages:  eng     Pagination:  6369-79     Citation Subset:  -    
Affiliation:
Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Major Laboratories of Integrated Circuits, Heilongjiang University, Harbin 150080, China. zxf80310@126.com
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