| Fabrication and Characteristics of an nc-Si/c-Si Heterojunction MOSFETs Pressure Sensor. | |
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MedLine Citation:
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PMID: 22778646 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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A novel nc-Si/c-Si heterojunction MOSFETs pressure sensor is proposed in this paper, with four p-MOSFETs with nc-Si/c-Si heterojunction as source and drain. The four p-MOSFETs are designed and fabricated on a square silicon membrane by CMOS process and MEMS technology where channel resistances of the four nc-Si/c-Si heterojunction MOSFETs form a Wheatstone bridge. When the additional pressure is P, the nc-Si/c-Si heterojunction MOSFETs pressure sensor can measure this additional pressure P. The experimental results show that when the supply voltage is 3 V, length-width (L:W) ratio is 2:1, and the silicon membrane thickness is 75 μm, the full scale output voltage of the pressure sensor is 15.50 mV at room temperature, and pressure sensitivity is 0.097 mV/kPa. When the supply voltage and L:W ratio are the same as the above, and the silicon membrane thickness is 45 μm, the full scale output voltage is 43.05 mV, and pressure sensitivity is 2.153 mV/kPa. Therefore, the sensor has higher sensitivity and good temperature characteristics compared to the traditional piezoresistive pressure sensor. |
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Authors:
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Xiaofeng Zhao; Dianzhong Wen; Gang Li |
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Publication Detail:
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Type: Journal Article Date: 2012-05-14 |
Journal Detail:
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Title: Sensors (Basel, Switzerland) Volume: 12 ISSN: 1424-8220 ISO Abbreviation: Sensors (Basel) Publication Date: 2012 |
Date Detail:
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Created Date: 2012-07-10 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 101204366 Medline TA: Sensors (Basel) Country: Switzerland |
Other Details:
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Languages: eng Pagination: 6369-79 Citation Subset: IM |
Affiliation:
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Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Major Laboratories of Integrated Circuits, Heilongjiang University, Harbin 150080, China; E-Mails: zxf80310@126.com (X.Z.); lig8-78@msn.com (G.L.). |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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