Document Detail

FEA of CMUTs Suitable for Wide Gas Pressure Range Applications.
MedLine Citation:
PMID:  21874100     Owner:  NLM     Status:  Publisher    
The ability of ultrasound transducers to operate over a wide and varying pressure range is essential in applications such as ultrasonic flow metering (UFM) of flare gas. We propose a new operational mode for capacitive micromachined ultrasonic transducers (CMUTs), in which the plate is in permanent contact with the bottom of the cavity, even at zero DC bias and 1 atm pressure. Finite element analysis (FEA) software was used to investigate the performance of these CMUTs within the pressure range of 1 to 20 atm. First, we performed a static analysis to determine the plate deflection and, thus, the gap height. Further, from the static analysis, we obtained the static and free capacitances for calculating the coupling efficiency, and a modal analysis identified possible design geometries for frequencies lower than ~ 300 kHz. Our calculations show that conventionally operated CMUTs have huge changes in static operational point at different pressures, while our proposed mode exhibits an acceptable frequency range (73 - 340 kHz) over 1 - 20 atm pressure and an improved coupling efficiency at lower dc bias voltages. A donut shape partial electrode further allows us to tune the coupling efficiency, which translates into a better performance, especially at the higher pressure range. FEA shows that our proposed operation mode is a promising solution for flare gas metering applications.
Min-Chieh Ho; Mario Kupnik; Butrus T Khuri-Yakub
Publication Detail:
Journal Detail:
Title:  Proceedings / IEEE ... Ultrasonics Symposium. IEEE Ultrasonics Symposium     Volume:  2010     ISSN:  1051-0117     ISO Abbreviation:  -     Publication Date:  2010 Oct 
Date Detail:
Created Date:  2011-8-29     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101525361     Medline TA:  Proc IEEE Ultrason Symp     Country:  -    
Other Details:
Languages:  ENG     Pagination:  1234-1237     Citation Subset:  -    
Edward L. Ginzton Laboratory, Stanford University, Stanford, CA.
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Grant Support
R01 CA134720-02//NCI NIH HHS; R01 CA134720-03//NCI NIH HHS

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