| Electrostatic actuator probe with curved electrodes for time-of-flight scanning force microscopy. | |
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MedLine Citation:
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PMID: 20815608 Owner: NLM Status: In-Process |
Abstract/OtherAbstract:
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In this study, we fabricated an electrostatic actuator probe having curved electrodes and evaluated its applicability for use in time-of-flight scanning force microscopy. In this probe, the end position of a cantilever with a tip is switched through electrostatic pull-in effect; the measurement modes can be changed between mass analysis and scanning force microscopy (SFM) modes. We achieved a large displacement of 400 microm for changing working modes. To prevent electrical shortage of the probe and curved electrodes, stoppers were formed along the curved electrodes. Because of the pull-in effect, the spring constant and resonance frequency increased through stiction of the cantilever to the stoppers. Using the fabricated probe, the SFM imaging of a sample featuring a 2-microm-pitch Au grid was demonstrated. |
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Authors:
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Chuan-Yu Shao; Yusuke Kawai; Masayoshi Esashi; Takahito Ono |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: The Review of scientific instruments Volume: 81 ISSN: 1089-7623 ISO Abbreviation: Rev Sci Instrum Publication Date: 2010 Aug |
Date Detail:
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Created Date: 2010-09-06 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0405571 Medline TA: Rev Sci Instrum Country: United States |
Other Details:
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Languages: eng Pagination: 083702 Citation Subset: - |
Affiliation:
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Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki, Aza-Aoba, Aobaku, Sendai 980-8579, Japan. |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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