Document Detail

Diamond-based capacitive micromachined ultrasonic transducers in immersion.
MedLine Citation:
PMID:  23357916     Owner:  NLM     Status:  In-Data-Review    
Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 V(p-p) sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm <y <-15 mm). The spectrum of the diamond-based CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 V(p-p) sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications.
Ahmet Cetin; Baris Bayram
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  IEEE transactions on ultrasonics, ferroelectrics, and frequency control     Volume:  60     ISSN:  1525-8955     ISO Abbreviation:  IEEE Trans Ultrason Ferroelectr Freq Control     Publication Date:  2013 Feb 
Date Detail:
Created Date:  2013-01-29     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  9882735     Medline TA:  IEEE Trans Ultrason Ferroelectr Freq Control     Country:  United States    
Other Details:
Languages:  eng     Pagination:  414-20     Citation Subset:  IM    
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