| Diamond-based capacitive micromachined ultrasonic transducers in immersion. | |
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MedLine Citation:
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PMID: 23357916 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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Diamond is a superior membrane material for capacitive micromachined ultrasonic transducers (CMUTs). By using ultrananocrystalline diamond (UNCD) membrane and plasma-activated wafer bonding technology, a single diamond-based circular CMUT is demonstrated and operated in immersion for the first time. The diamond-based CMUT, biased at 100 V, is excited with a 10-cycle burst of 36 V(p-p) sine signal at 3.5 MHz. Pressure generated on a 2-D plane coincident with the normal of the CMUT is measured using a broadband hydrophone. Peak-to-peak hydrophone voltage measurements along the scan area clearly indicate the main lobe and the side lobes, as theoretically predicted by our directivity function calculations. The peak-to-peak hydrophone voltage on the axial direction of the CMUT is found to be in agreement with our theoretical calculations in the Fraunhofer region (-45 mm <y <-15 mm). The spectrum of the diamond-based CMUT is measured for a dc bias of 100 V, and ac excitation with 30-cycle bursts of 9, 36, and 54 V(p-p) sine signal. A peak response at 5.6 MHz is measured for all ac amplitudes. Overall, diamond is shown to be an applicable membrane for CMUT devices and applications. |
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Authors:
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Ahmet Cetin; Baris Bayram |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Volume: 60 ISSN: 1525-8955 ISO Abbreviation: IEEE Trans Ultrason Ferroelectr Freq Control Publication Date: 2013 Feb |
Date Detail:
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Created Date: 2013-01-29 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 9882735 Medline TA: IEEE Trans Ultrason Ferroelectr Freq Control Country: United States |
Other Details:
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Languages: eng Pagination: 414-20 Citation Subset: IM |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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