Document Detail


Development and performance analysis of a standard orifice flow calibration system.
MedLine Citation:
PMID:  19655977     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
An orifice flow system has been developed indigenously which is a primary standard for the calibration of high vacuum gauges in the range of 10(-3)-10(-6) mbar. It consists of a constant-volume flow meter, designed to generate a known flow rate of a particular gas to the vacuum chamber. This chamber is partitioned into two parts by a plate with an orifice of calculable conductance. The pressures, generated by this standard system, are compared with those of secondary standard, namely, spinning rotor gauge. Different uncertainties and correction factors are calculated. The maximum percentage deviation is from 1.16% to 0.97%. The combined uncertainties over the entire calibration range of the standard system are in the range of 4.0 x 10(-6) mbar.
Authors:
H M Akram; M Maqsood; H Rashid
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  The Review of scientific instruments     Volume:  80     ISSN:  1089-7623     ISO Abbreviation:  Rev Sci Instrum     Publication Date:  2009 Jul 
Date Detail:
Created Date:  2009-08-06     Completed Date:  2009-10-09     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0405571     Medline TA:  Rev Sci Instrum     Country:  United States    
Other Details:
Languages:  eng     Pagination:  075103     Citation Subset:  -    
Affiliation:
NINVAST, National Centre for Physics Complex, Shahdara Valley Road, P.O. Box # 3125, Islamabad, Pakistan.
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