Document Detail


Development of a high temperature-atmospheric pressure environmental cell for high-resolution TEM.
MedLine Citation:
PMID:  21427119     Owner:  NLM     Status:  Publisher    
Abstract/OtherAbstract:
An environmental cell for high-temperature, high-resolution transmission electron microscopy of nanomaterials in near atmospheric pressures is developed. The developed environmental cell is a side-entry type with built-in specimen-heating element and micropressure gauge. The relationship between the cell condition and the quality of the transmission electron microscopic (TEM) image and the diffraction pattern was examined experimentally and theoretically. By using the cell consisting of two electron-transparent silicon nitride thin films as the window material, the gas pressure inside the environmental cell is continuously controlled from 10(-5) Pa to the atmospheric pressure in a high-vacuum TEM specimen chamber. TEM image resolutions of 0.23 and 0.31 nm were obtained using 15-nm-thick silicon nitride film windows with the pressure inside the cell being around 5 × 10(-5) and 1 × 10(4) Pa, respectively.
Authors:
Toshie Yaguchi; Makoto Suzuki; Akira Watabe; Yasuhira Nagakubo; Kota Ueda; Takeo Kamino
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Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2011-3-22
Journal Detail:
Title:  Journal of electron microscopy     Volume:  -     ISSN:  1477-9986     ISO Abbreviation:  -     Publication Date:  2011 Mar 
Date Detail:
Created Date:  2011-3-23     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  7611157     Medline TA:  J Electron Microsc (Tokyo)     Country:  -    
Other Details:
Languages:  ENG     Pagination:  -     Citation Subset:  -    
Affiliation:
Hitachi High Technologies Corp., Hitachinaka, Ibaraki 312-8504, Japan.
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