Document Detail


Density multiplication and improved lithography by directed block copolymer assembly.
MedLine Citation:
PMID:  18703735     Owner:  NLM     Status:  PubMed-not-MEDLINE    
Abstract/OtherAbstract:
Self-assembling materials spontaneously form structures at length scales of interest in nanotechnology. In the particular case of block copolymers, the thermodynamic driving forces for self-assembly are small, and low-energy defects can get easily trapped. We directed the assembly of defect-free arrays of isolated block copolymer domains at densities up to 1 terabit per square inch on chemically patterned surfaces. In comparing the assembled structures to the chemical pattern, the density is increased by a factor of four, the size is reduced by a factor of two, and the dimensional uniformity is vastly improved.
Authors:
Ricardo Ruiz; Huiman Kang; François A Detcheverry; Elizabeth Dobisz; Dan S Kercher; Thomas R Albrecht; Juan J de Pablo; Paul F Nealey
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Publication Detail:
Type:  Journal Article; Research Support, Non-U.S. Gov't; Research Support, U.S. Gov't, Non-P.H.S.    
Journal Detail:
Title:  Science (New York, N.Y.)     Volume:  321     ISSN:  1095-9203     ISO Abbreviation:  Science     Publication Date:  2008 Aug 
Date Detail:
Created Date:  2008-08-15     Completed Date:  2008-08-26     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0404511     Medline TA:  Science     Country:  United States    
Other Details:
Languages:  eng     Pagination:  936-9     Citation Subset:  -    
Affiliation:
Hitachi Global Storage Technologies, San Jose Research Center, 3403 Yerba Buena Road, San Jose, CA 95135, USA. Ricardo.Ruiz@hitachigst.com
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Comments/Corrections
Comment In:
Science. 2008 Aug 15;321(5891):919-20   [PMID:  18703729 ]

From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine


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