Document Detail

Deep ultraviolet microscope.
MedLine Citation:
PMID:  20556136     Owner:  NLM     Status:  In-Data-Review    
A visible-light microscope has been modified to obtain deep UV (190-350-nm) images using reflected illumination. Potential advantages of deep UV microscopy include better resolution, depth of focus, and contrast for certain materials and fewer artifacts when viewing multilayered structures. These advantages are especially useful when viewing organic or semiconducting materials that are transparent or colored when viewed with visible light but are completely opaque when viewed using deep UV wavelengths. The hardware and optics of this microscope are described, and several uses are proposed for integrated circuit manufacture.
P A Heimann; R Urstadt
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Applied optics     Volume:  29     ISSN:  0003-6935     ISO Abbreviation:  Appl Opt     Publication Date:  1990 Feb 
Date Detail:
Created Date:  2010-06-17     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  0247660     Medline TA:  Appl Opt     Country:  United States    
Other Details:
Languages:  eng     Pagination:  495-501     Citation Subset:  -    
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