| Deep-UVsensors based on SAW oscillators using low-temperature-grown AlN films on sapphires. | |
| | |
MedLine Citation:
|
PMID: 21859589 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
|
High-quality epitaxial AlN films were deposited on sapphire substrates at low growth temperature using a helicon sputtering system. SAW filters fabricated on the AlN films exhibited excellent characteristics, with center frequency of 354.2 MHz, which corresponds to a phase velocity of 5667 m/s. An oscillator fabricated using AlN-based SAW devices is presented and applied to deep-UV light detection. A frequency downshift of about 43 KHz was observed when the surface of SAW device was illuminated by a UV source with dominant wavelength of around 200 nm. The results indicate the feasibility of developing remote sensors for deep-UV measurement using AlN-based SAW oscillators. |
| | |
Authors:
|
Chipta Laksana; Meei-Ru Chen; Yen Liang; An-Jyeg Tzou; Hui-Ling Kao; Erik Jeng; Jyh Chen; Hou-Guang Chen; Sheng-Rui Jian |
Related Documents
:
|
17067849 - Seeing the rainbow: light sensing in fungi. 11607519 - Bumblebee preference for symmetrical flowers. 12024229 - Interactions between gravitropism and phototropism in plants. 21654749 - X-ray illumination of the ejecta of supernova 1987a. 22092489 - What drives the distribution of the bloom forming cyanobacteria planktothrix agardhii a... 414739 - Developmental patterns of 3-hydroxykynurenine accumulation in white and various other e... 16653159 - Vanadate inhibits blue light-stimulated swelling of vicia guard cell protoplasts. 15820519 - Vertical-disparity gradients are processed independently in different depth planes. 14969969 - Carbon dioxide exchange of developing avocado (persea americana mill.) fruit. |
Publication Detail:
|
Type: Journal Article |
Journal Detail:
|
Title: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Volume: 58 ISSN: 1525-8955 ISO Abbreviation: IEEE Trans Ultrason Ferroelectr Freq Control Publication Date: 2011 Aug |
Date Detail:
|
Created Date: 2011-08-23 Completed Date: - Revised Date: - |
Medline Journal Info:
|
Nlm Unique ID: 9882735 Medline TA: IEEE Trans Ultrason Ferroelectr Freq Control Country: United States |
Other Details:
|
Languages: eng Pagination: 1688-93 Citation Subset: IM |
Export Citation:
|
APA/MLA Format Download EndNote Download BibTex |
| MeSH Terms | |
Descriptor/Qualifier:
|
|
From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
Previous Document: Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of ...
Next Document: Unprecedented long-term frequency stability with a microwave resonator oscillator.