| Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed. | |
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MedLine Citation:
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PMID: 22225220 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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The mechanical design of a high-bandwidth, short-range vertical positioning stage is described for integration with a commercial scanning probe microscope (SPM) for dual-stage actuation to significantly improve scanning performance. The vertical motion of the sample platform is driven by a stiff and compact piezo-stack actuator and guided by a novel circular flexure to minimize undesirable mechanical resonances that can limit the performance of the vertical feedback control loop. Finite element analysis is performed to study the key issues that affect performance. To relax the need for properly securing the stage to a working surface, such as a laboratory workbench, an inertial cancellation scheme is utilized. The measured dominant unloaded mechanical resonance of a prototype stage is above 150 kHz and the travel range is approximately 1.56 μm. The high-bandwidth stage is experimentally evaluated with a basic commercial SPM, and results show over 25-times improvement in the scanning performance. |
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Authors:
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Brian J Kenton; Andrew J Fleming; Kam K Leang |
Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: The Review of scientific instruments Volume: 82 ISSN: 1089-7623 ISO Abbreviation: Rev Sci Instrum Publication Date: 2011 Dec |
Date Detail:
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Created Date: 2012-01-09 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 0405571 Medline TA: Rev Sci Instrum Country: United States |
Other Details:
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Languages: eng Pagination: 123703 Citation Subset: IM |
Affiliation:
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Department of Mechanical Engineering, University of Nevada Reno, Reno, Nevada 89557-0312, USASchool of Electrical Engineering and Computer Science, University of Newcastle, NSW 2308, Australia. |
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Descriptor/Qualifier:
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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