Document Detail

Calibration of Piezoelectric Positioning Actuators Using a Reference Voltage-to-Displacement Transducer Based on Quartz Tuning Forks.
MedLine Citation:
PMID:  22436334     Owner:  NLM     Status:  In-Data-Review    
We use a piezoelectric quartz tuning fork to calibrate the displacement of ceramic piezoelectric scanners that are widely employed in scanning probe microscopy. We measure the static piezoelectric response of a quartz tuning fork and find it to be highly linear, nonhysteretic and with negligible creep. These performance characteristics, close to those of an ideal transducer, make quartz transducers superior to ceramic piezoelectric actuators. Furthermore, quartz actuators in the form of a tuning fork have the advantage of yielding static displacements comparable to those of local probe microscope scanners. We use the static displacement of a quartz tuning fork as a reference to calibrate the three axis displacement of a ceramic piezoelectric scanner. Although this calibration technique is a nontraceable method, it can be more versatile than using calibration grids because it enables characterization of the linear and nonlinear response of a piezoelectric scanner in a broad range of displacements, spanning from a fraction of a nanometer to hundreds of nanometers. In addition, the creep and the speed dependent piezoelectric response of ceramic scanners can be studied in detail.
Andres Castellanos-Gomez; Carlos R Arroyo; Nicolás Agraït; Gabino Rubio-Bollinger
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Publication Detail:
Type:  Journal Article    
Journal Detail:
Title:  Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada     Volume:  18     ISSN:  1435-8115     ISO Abbreviation:  Microsc. Microanal.     Publication Date:  2012 Apr 
Date Detail:
Created Date:  2012-03-22     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  9712707     Medline TA:  Microsc Microanal     Country:  United States    
Other Details:
Languages:  eng     Pagination:  353-8     Citation Subset:  IM    
Departamento de Física de la Materia Condensada (C-III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain.
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