| Calibration of Piezoelectric Positioning Actuators Using a Reference Voltage-to-Displacement Transducer Based on Quartz Tuning Forks. | |
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MedLine Citation:
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PMID: 22436334 Owner: NLM Status: In-Data-Review |
Abstract/OtherAbstract:
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We use a piezoelectric quartz tuning fork to calibrate the displacement of ceramic piezoelectric scanners that are widely employed in scanning probe microscopy. We measure the static piezoelectric response of a quartz tuning fork and find it to be highly linear, nonhysteretic and with negligible creep. These performance characteristics, close to those of an ideal transducer, make quartz transducers superior to ceramic piezoelectric actuators. Furthermore, quartz actuators in the form of a tuning fork have the advantage of yielding static displacements comparable to those of local probe microscope scanners. We use the static displacement of a quartz tuning fork as a reference to calibrate the three axis displacement of a ceramic piezoelectric scanner. Although this calibration technique is a nontraceable method, it can be more versatile than using calibration grids because it enables characterization of the linear and nonlinear response of a piezoelectric scanner in a broad range of displacements, spanning from a fraction of a nanometer to hundreds of nanometers. In addition, the creep and the speed dependent piezoelectric response of ceramic scanners can be studied in detail. |
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Authors:
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Andres Castellanos-Gomez; Carlos R Arroyo; Nicolás Agraït; Gabino Rubio-Bollinger |
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Publication Detail:
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Type: Journal Article |
Journal Detail:
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Title: Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada Volume: 18 ISSN: 1435-8115 ISO Abbreviation: Microsc. Microanal. Publication Date: 2012 Apr |
Date Detail:
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Created Date: 2012-03-22 Completed Date: - Revised Date: - |
Medline Journal Info:
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Nlm Unique ID: 9712707 Medline TA: Microsc Microanal Country: United States |
Other Details:
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Languages: eng Pagination: 353-8 Citation Subset: IM |
Affiliation:
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Departamento de Física de la Materia Condensada (C-III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain. |
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From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine
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