Document Detail

Biaxially textured Al film growth on CaF2 nanostructures toward a method of preparing single-crystalline Si film on glass substrates.
MedLine Citation:
PMID:  20839785     Owner:  NLM     Status:  PubMed-not-MEDLINE    
We report the room temperature growth of biaxially textured Al films and further demonstrate the use of these Al films in preparing single-crystalline Si layers on glass substrates. The formation of the biaxial texture in Al film relies on the existence of the CaF(2) buffer layer prepared using oblique angle physical vapor deposition, which consists of single-crystalline nanorods with caps that are in the form of inverted nanopyramids. The single-crystalline Si film was obtained upon crystallization of the amorphous Si film deposited through physical evaporation on the biaxially textured Al film. This method of preparing single-crystalline Si film on glass substrate is potentially attractive for being employed in silicon technology and in fabrication of low-cost electronic devices.
Huafang Li; Patrick Snow; Ming He; Pei-I Wang; Gwo-Ching Wang; Toh-Ming Lu
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Publication Detail:
Type:  Journal Article; Research Support, U.S. Gov't, Non-P.H.S.    
Journal Detail:
Title:  ACS nano     Volume:  4     ISSN:  1936-086X     ISO Abbreviation:  ACS Nano     Publication Date:  2010 Oct 
Date Detail:
Created Date:  2010-10-26     Completed Date:  2011-02-02     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101313589     Medline TA:  ACS Nano     Country:  United States    
Other Details:
Languages:  eng     Pagination:  5627-32     Citation Subset:  -    
Department of Physics, Applied Physics and Astronomy, and Center for Integrated Electronics, Rensselaer Polytechnic Institute, 110 Eighth Street, Troy, New York 12180-3590, USA.
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