Document Detail


Behavior characteristics of nano-stage according to hinge structure.
MedLine Citation:
PMID:  18047138     Owner:  NLM     Status:  MEDLINE    
Abstract/OtherAbstract:
Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.
Authors:
Hyun-Seong Oh; Sung-Jun Lee; Yong-Woo Kim; Deug-Woo Lee
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Publication Detail:
Type:  Evaluation Studies; Journal Article; Research Support, Non-U.S. Gov't    
Journal Detail:
Title:  Journal of nanoscience and nanotechnology     Volume:  7     ISSN:  1533-4880     ISO Abbreviation:  J Nanosci Nanotechnol     Publication Date:  2007 Nov 
Date Detail:
Created Date:  2007-11-30     Completed Date:  2008-01-03     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101088195     Medline TA:  J Nanosci Nanotechnol     Country:  United States    
Other Details:
Languages:  eng     Pagination:  4146-9     Citation Subset:  IM    
Affiliation:
Department of Mechanical and Precision Engineering, Pusan National University, Pusan 609-735, Korea.
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MeSH Terms
Descriptor/Qualifier:
Computer Simulation
Computer-Aided Design*
Equipment Design
Equipment Failure Analysis
Micromanipulation / instrumentation*,  methods
Models, Theoretical*
Nanotechnology / instrumentation*,  methods

From MEDLINE®/PubMed®, a database of the U.S. National Library of Medicine


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