Document Detail

Atomic Calligraphy: The Direct Writing of Nanoscale Structures using MEMS.
MedLine Citation:
PMID:  23782403     Owner:  NLM     Status:  Publisher    
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines, we fabricate apertures with features less than 50 nm in diameter on plates that can be moved with nanometer precision over an area greater than 20 x 20 μm(2). Depositing thermally evaporated gold atoms though the apertures while moving the plate results in the deposition of nanoscale metal patterns. Adding a shutter positioned microns above the aperture enables high speed control of not only where but also when atoms are deposited. With this shutter, different sized apertures can be opened and closed selectively for nano-structure fabrication with features ranging from nano- to micrometers in scale. The ability to evaporate materials with high precision, and thereby fabricate circuits and structures in situ, enables new kinds of experiments based on the interactions of a small number of atoms and eventually even single atoms.
Matthias Imboden; Han Han; Jackson Chang; Flavio Pardo; Cristian A Bolle; Evan Lowell; David J Bishop
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Publication Detail:
Type:  JOURNAL ARTICLE     Date:  2013-6-19
Journal Detail:
Title:  Nano letters     Volume:  -     ISSN:  1530-6992     ISO Abbreviation:  Nano Lett.     Publication Date:  2013 Jun 
Date Detail:
Created Date:  2013-6-20     Completed Date:  -     Revised Date:  -    
Medline Journal Info:
Nlm Unique ID:  101088070     Medline TA:  Nano Lett     Country:  -    
Other Details:
Languages:  ENG     Pagination:  -     Citation Subset:  -    
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